Japan, Sept. 3 -- ASM IP HOLDING BV has got intellectual property rights for 'CHEMICAL VAPOR DEPOSITION FURNACE FOR DEPOSITING FILMS.' Other related details are as follows:
Application Number: JP,2022-101927
Category (FI): H10P14/60,101@B,H01L21/31@B,H01L21/318@B,H10P14/694@B
Stage: Grant (IP right granted following substantive examination.)
Filing Date: June 24, 2022
Publication Date: Jan. 18, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....