Japan Intellectual Property Rights: CENTERING DEVICE, CENTERING METHOD AND SUBSTRATE PROCESSING APPARATUS

Japan, Sept. 14 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'CENTERING DEVICE, CENTERING METHOD AND SUBSTRATE PROCESSING APPARATUS.' Other related details are as follows:

Application Number: JP,2023-010982

Category (FI): H10P72/50@G,H01L21/68@F,H01L21/306@R,H01L21/304,643@A,H10P50/60@R,H10P70/00,103@A,H10P72/50@F

Stage: Grant (IP right granted following substantive examination.)

Filing Date: Jan. 27, 2023

Publication Date: Aug. 8, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....