Japan, Aug. 24 -- SCREEN HOLDINGS CO LTD has got intellectual property rights for 'CENTERING DEVICE, CENTERING METHOD, AND SUBSTRATE PROCESSING DEVICE.' Other related details are as follows:

Application Number: JP,2022-104216

Category (FI): H10P50/60@R,H10P72/70,H01L21/68@N,H01L21/304,651@B,H01L21/306@R,H10P70/00,201@B

Stage: Grant (IP right granted following substantive examination.)

Filing Date: June 29, 2022

Publication Date: Jan. 17, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....