Japan, June 22 -- APPLIED MATERIALS INC has got intellectual property rights for 'CAPACITIVE SENSING DATA INTEGRATION FOR PLASMA CHAMBER CONDITION MONITORING.' Other related details are as follows:

Application Number: JP,2024-107828

Category (FI): C23C16/44@B,H01L21/205,H01L21/302,103,H01L21/31@C,H10P14/24,H10P14/60,101@C,H10P50/20,103

Stage: Grant (IP right granted following substantive examination.)

Filing Date: July 4, 2024

Publication Date: Oct. 29, 2024

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....