Japan, Aug. 14 -- LAM RESEARCH CORPORATION has got intellectual property rights for 'AUTOMATED HANDLING OF EDGE RINGS THAT REQUIRE ROTATIONAL ALIGNMENT.' Other related details are as follows:
Application Number: JP,2024-225908
Category (FI): H01L21/31@C,H01L21/68@A,H01L21/68@F,H01L21/302,101@G,H10P72/50@F,H10P72/30@A,H10P50/20,101@G,H10P14/60,101@C
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Dec. 23, 2024
Publication Date: April 10, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....