Japan, June 25 -- TOKYO ELECTRON LTD has got intellectual property rights for 'APPARATUS FOR TRANSFERRING SUBSTRATE, SYSTEM FOR PROCESSING SUBSTRATE AND METHOD FOR PROCESSING SUBSTRATE.' Other related details are as follows:
Application Number: JP,2025-078228
Category (FI): B65G49/07@E,H10P72/30@A,H01L21/68@A
Stage: Grant (IP right granted following substantive examination.)
Filing Date: May 8, 2025
Publication Date: July 30, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....