Japan, Aug. 12 -- CYMER LLC has got intellectual property rights for 'APPARATUS AND METHOD FOR OPTICAL COMPONENT ALIGNMENT.' Other related details are as follows:
Application Number: JP,2024-212996
Category (FI): H01S3/10@Z,G02B5/04,G02B5/26,G03F7/20,501,G03F7/20,521
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Dec. 6, 2024
Publication Date: April 10, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....