Japan, Oct. 9 -- APPLIED MATERIALS INC has got intellectual property rights for 'APPARATUS AND METHOD FOR CONTROLLING ION ENERGY DISTRIBUTION.' Other related details are as follows:
Application Number: JP,2024-196571
Category (FI): H01L21/68@N,H10P50/20,101@G,H10P72/70,H05H1/46@R,H05H1/46@L,H01L21/302,101@G,C23C16/52
Stage: Grant (IP right granted following substantive examination.)
Filing Date: Nov. 11, 2024
Publication Date: March 5, 2025
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....