Japan, Aug. 26 -- NIKON CORP has got intellectual property rights for 'ANALYSIS SYSTEM AND EXPOSURE METHOD.' Other related details are as follows:
Application Number: JP,2022-057919
Category (FI): G03F9/00@Z,G03F7/20,501
Stage: Grant (IP right granted following substantive examination.)
Filing Date: March 31, 2022
Publication Date: Oct. 13, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....