MUMBAI, India, Oct. 26 -- Intellectual Property India has published a patent application (202644041704 A) filed by Canon Kabushiki Kaisha - on April 01, 2026, for Substrate Processing Apparatus And Article Manufacturing Method.
Inventor includes Koichi Tamura.
The application for the patent was published on October 23, 2026, under issue no. 43/2026.
Abstract: A substrate processing apparatus comprises a stage (20) configured to hold a substrate (16); a hand (42, 43) configured to convey the substrate; and a controller (30) configured to control at least one of a substrate supply operation onto the stage by the hand and a substrate collection operation from the stage by the hand. A chuck (21) selected from among a plurality of types of ch...