MUMBAI, India, July 13 -- Intellectual Property India has published a patent application (202527093389 A) filed by Suzhou Maxwell Technologies Co. , Ltd.; and Suzhou Maizheng Technology Co. , Ltd. on September 29, 2025, for Radio Frequency Feed Structure And Pecvd Device Having Same.
Inventors include Qu, Qingyuan; Wang, Fengming; Gao, Lei; Zhang, Heng; and Han, Shaowen Number.
The application for the patent was published on July 10, 2026, under issue no. 28/2026.
Abstract: The present application relates to the field of chemical vapor deposition, and discloses a radio frequency feed structure and a PECVD device have same. The radio frequency feed structure is used for a PECVD device. The radio frequency feed structure comprises: at leas...