MUMBAI, India, July 13 -- Intellectual Property India has published a patent application (202617071514 A) filed by Tokyo Electron Limited on June 09, 2026, for Monitoring System, Monitoring Method, Monitoring Device, And Detection Tape.
Inventors include Akada, Hikaru; and Ogami, Takayuki.
The application for the patent was published on July 10, 2026, under issue no. 28/2026.
Abstract: A monitoring system for monitoring the periphery of a substrate processing apparatus installed in a clean room, the monitoring system including a detection tape which is disposed on the upper surface of floor tiles in a part or all of the periphery of the substrate processing apparatus so as to extend across a plurality of the floor tiles, the detection ta...