MUMBAI, India, July 24 -- Intellectual Property India has published a patent application (202647084647 A) filed by Cymer, LLC on July 10, 2026, for Methods And Systems For Providing Loopback Diagnostics.
Inventors include Knight, Laura, Elizabeth; and Kaseff, Charles, Abraham.
The application for the patent was published on July 17, 2026, under issue no. 29/2026.
Abstract: Methods and systems for validating one or more sensors, one or more circuit boards, one or more connectors, or the like in lithographic apparatuses and systems are provided. For example, a metrology system (600) includes a first circuit board (603) including a sensor (611) and a multiplexer (613) configured to receive a first analog signal (621) corresponding to a firs...