MUMBAI, India, Nov. 2 -- Intellectual Property India has published a patent application (202617095830 A) filed by Aixtron Se on August 07, 2026, for Method And Device For Determining The Processability Of A Substrate.
Inventors include Mauder, Christof; Meyer, Dominik; and Debald, Arne Lars.
The application for the patent was published on October 30, 2026, under issue no. 44/2026.
Abstract: The invention relates to a method for treating a substrate (7) in a process chamber (8), wherein the substrate (7) is heated to an elevated temperature (t) in order to remove oxides from the surface or deposit a layer on it. According to the invention, the surface of the substrate (7) or of the layer is observed using an optical measuring device (11)....