MUMBAI, India, Aug. 31 -- Intellectual Property India has published a patent application (202644021712 A) filed by Canon Kabushiki Kaisha on February 24, 2026, for Liquid Circulation Apparatus, Substrate Processing Apparatus, And Method Of Manufacturing Product.
Inventors include Hiroki Shimizu; and Makoto Nomoto -.
The application for the patent was published on August 28, 2026, under issue no. 35/2026.
Abstract: A liquid circulation apparatus for cooling a heat generating part, including: a circulation path of a liquid; a deoxygenation unit that is provided on the circulation path and reduces oxygen in the liquid; and an evaporation reduction unit for reducing the amount of evaporation of the liquid. [Figure 1]
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