Intellectual Property India Publishes Patent Application for Laser Chamber With Discharge System Having Acoustic Scattering Surfaces

MUMBAI, India, July 7 -- Intellectual Property India has published a patent application (202647080393 A) filed by Cymer, LLC on June 30, 2026, for Laser Chamber With Discharge System Having Acoustic Scattering Surfaces.

Inventor includes Rokitski, Rostislav.

The application for the patent was published on July 03, 2026, under issue no. 27/2026.

Abstract: An apparatus for generating laser radiation from discharges in a discharge chamber in which the discharges produce acoustic waves which would disrupt operation of the apparatus at certain repetition rates if reflected back to their origin in which a surface of an electrode adjacent the preionizer tube or a surface of the preionizer tube or both are provided with acoustic scattering featu...