MUMBAI, India, June 26 -- Intellectual Property India has published a patent application (202514115158 A) filed by Ebara Corporation on November 21, 2025, for Information Processing Apparatus.
Inventor includes Takubo Shinya -.
The application for the patent was published on June 19, 2026, under issue no. 25/2026.
Abstract: An information processing apparatus (3) executes, on substrate processing units and a substrate transport unit, first mathematical optimization for determining a start timing of each process on a substrate without setting an exclusive processing condition for selecting one of two processes as a constraint condition of the mathematical optimization, and determines whether there is a substrate processing unit or a subst...