Intellectual Property India Publishes Patent Application for Hybrid Piezoelectric-Electrostatic Rf Mems Resonator With Active Thermoelastic Damping Suppression And Frequency Reconfigurability

MUMBAI, India, June 30 -- Intellectual Property India has published a patent application (202641073829 A) filed by Madhankumar C; Dr. Resmi R; Dr. Pramod P; Dr. Sajan Jerome; Dr. Anu Babu; Dr. Baiju P. S; and Dr. Anil Kumar E. N on June 15, 2026, for Hybrid Piezoelectric-Electrostatic Rf Mems Resonator With Active Thermoelastic Damping Suppression And Frequency Reconfigurability.

Inventors include Dr. Resmi R; Dr. Pramod P; Dr. Sajan Jerome; Dr. Anu Babu; Dr. Baiju P. S; and Dr. Anil Kumar E. N.

The application for the patent was published on June 26, 2026, under issue no. 26/2026.

Abstract: Hybrid Piezoelectric-Electrostatic RF MEMS Resonator with Active Thermoelastic Damping Suppression and Frequency Reconfigurability Abstract The rapi...