Intellectual Property India Publishes Patent Application for Height Measurement Device, Exposure Apparatus, And Article Manufacturing Method

MUMBAI, India, July 24 -- Intellectual Property India has published a patent application (202544131304 A) filed by Canon Kabushiki Kaisha on December 24, 2025, for Height Measurement Device, Exposure Apparatus, And Article Manufacturing Method.

Inventors include Naoki Funabashi; Yusuke Endo; Mizuki Narimatsu; Shigeo Koya; Yuichiro Morikuni -; and Shinzo Uchiyama.

The application for the patent was published on July 17, 2026, under issue no. 29/2026.

Abstract: A height measurement device includes an optical measurement device configured to measure a height of a substrate, an air sensor configured to measure a height of the substrate while discharging air through a pipeline based on a pressure in the pipeline, a member having a reference s...