MUMBAI, India, Nov. 2 -- Intellectual Property India has published a patent application (202647127814 A) filed by Applied Materials, Inc. on October 27, 2026, for Dynamic Frequency Tuning For Microwave Power Amplifiers.
Inventors include Yang, Xiaokang; Seshadri, Vishesh; Ravikiran, Manasakiran; Sawalkar, Saloni; and Baluja, Sanjeev.
The application for the patent was published on October 30, 2026, under issue no. 44/2026.
Abstract: In some aspects, the embodiments described herein relate to a method for tuning a frequency of microwave power delivered to a chamber, including striking a plasma in the chamber. Embodiments may further comprise scanning the frequency from a first frequency to a second frequency, where a set point frequency i...