Intellectual Property India Publishes Patent Application for 'Substrate Processing System And Substrate Processing Device' Filed by Tokyo Electron Limited

MUMBAI, India, March 14 -- Intellectual Property India has published a patent application (202617019913 A) filed by Tokyo Electron Limited, Tokyo, on Feb. 20, for 'substrate processing system and substrate processing device.'

Inventor(s) include Amikura, Norihiko.

The application for the patent was published on March 13, under issue no. 11/2026.

According to the abstract released by the Intellectual Property India: "This substrate processing system is provided with: a vacuum conveyance module; a main interface unit having a first surface connected to the vacuum conveyance module, a second surface opposite to the first surface, an upper surface, and a lower surface; and a substrate processing module. The substrate processing module includ...