India, Oct. 2 -- Lam Research Corp. and JSR Corp., a leading technology company focused on materials innovation solutions, and the parent company of Inpria Corp., a metal oxide photoresist solution provider, announced that Lam and JSR/Inpria have entered into a non-exclusive cross-licensing and collaboration agreement to advance leading-edge semiconductor manufacturing.
The partnership is intended to accelerate the industry's transition to next-generation patterning, including dry resist technology for extreme ultraviolet (EUV) lithography, and advance the development of next-generation materials for atomic layer etching and deposition processes.
The agreement capitalizes on JSR group's innovative semiconductor materials, including meta...
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