India, Feb. 17 -- American semiconductor tech giant KLA Corp. has signed a Memorandum of Understanding (MoU) with the Tamil Nadu government to establish a new R&D campus in Chennai, with plans to invest up to $400 million (Rs 3,600 crore) over the next decade.

The agreement marks a significant expansion of the company's operations in India and reinforces the state's growing prominence in the global semiconductor industry.

The planned facility will be built on a 12-acre site and is envisioned as one of KLA's largest innovation hubs worldwide, with a potential capacity of up to 1.5 million square feet over time.

The campus designed to support advanced research and engineering in semiconductor process control and AI-led innovation, and is...