US Patent Issued to YEST on Sept. 1 for "Humidity control system for EFEM using desiccant" (South Korean Inventors)

ALEXANDRIA, Va., Sept. 1 -- United States Patent no. 12,722,116, issued on Sept. 1, was assigned to YEST Co. Ltd. (Pyeongtaek-si, South Korea).

"Humidity control system for EFEM using desiccant" was invented by Tae Hoon Kim (Yongin-si, South Korea), Han Kil Yoo (Hwaseong-si, South Korea), Hyuk Jin Jang (Pyeongtaek-si, South Korea), Min Woo Choi (Pyeongtaek-si, South Korea) and Da Woon Chae (Yongin-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed is a humidity control system for an EFEM using desiccant includes the equipment front end module (EFEM) including a transfer chamber being a space, in which a processing target object is transferred into a processing module, and a desiccant eq...