US Patent Issued to YCCHEM on June 16 for "Polishing compostion for semiconductor process, manufacturing method of polishing composition and method for manufacturing semiconductor device by using the same" (South Korean Inventors)

ALEXANDRIA, Va., June 16 -- United States Patent no. 12,655,320, issued on June 16, was assigned to YCCHEM Co. LTD. (Gyeongsangbuk-do, South Korea).

"Polishing compostion for semiconductor process, manufacturing method of polishing composition and method for manufacturing semiconductor device by using the same" was invented by Han Teo Park (Seoul, South Korea), Deok Su Han (Seoul, South Korea), Jang Kuk Kwon (Seoul, South Korea) and Seung Chul Hong (Seoul, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present invention relates to a semiconductor process polishing composition and a semiconductor device manufacturing method in which the polishing composition is applied, and can provide a prepa...