ALEXANDRIA, Va., Dec. 2 -- United States Patent no. 12,487,206, issued on Dec. 2, was assigned to Yamaha Robotics Co. Ltd. (Tokyo).
"Defect detection device and defect detection method" was invented by Hiroshi Munakata (Tokyo), Michael Kirkby (Tokyo) and Takuya Adachi (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "A defect detection device (100) that detects defects in a semiconductor device (13) comprises ultrasonic speakers (21) that ultrasonically vibrate the semiconductor device (13), a laser source (30) that irradiates the semiconductor device (13) with collimated laser light (32), a camera (40) that has an imaging element (42) which acquires images by imaging the semiconductor device (13) that h...