US Patent Issued to Versum Materials US on Jan. 27 for "Organoamino-functionalized linear and cyclic oligosiloxanes for deposition of silicon-containing films" (California Inventors)

ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,534,579, issued on Jan. 27, was assigned to Versum Materials US LLC (Tempe, Ariz.).

"Organoamino-functionalized linear and cyclic oligosiloxanes for deposition of silicon-containing films" was invented by Manchao Xiao (San Diego), Matthew R. MacDonald (Laguna Niguel, Calif.), Xinjian Lei (Vista, Calif.) and Meiliang Wang (San Marcos, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Amino-functionalized linear and cyclic oligosiloxanes, which have at least two silicon and two oxygen atoms as well as an organoamino group and methods for making the oligosiloxanes are disclosed. Methods for depositing silicon and oxygen containing films using the organ...