US Patent Issued to Verity Instruments on Sept. 22 for "Very high resolution spectrometer for monitoring of semiconductor processes" (Texas Inventor)

ALEXANDRIA, Va., Sept. 24 -- United States Patent no. 12,742,678, issued on Sept. 22, was assigned to Verity Instruments Inc. (Carrollton, Texas).

"Very high resolution spectrometer for monitoring of semiconductor processes" was invented by Andrew Weeks Kueny (Carrollton, Texas).

According to the abstract* released by the U.S. Patent & Trademark Office: "An optical instrument of very high resolution is provided that can be used for monitoring semiconductor processes. Very high resolution may be considered in this application space to be resolutions sufficient to permit resolving of individual molecular rovibrational emission lines. In one example an optical instrument is provided that includes: (1) an optical interface that receives an op...