US Patent Issued to VEECO INSTRUMENTS on Sept. 15 for "Lightpipe for high temperature substrate processing" (California Inventor)

ALEXANDRIA, Va., Sept. 15 -- United States Patent no. 12,736,408, issued on Sept. 15, was assigned to VEECO INSTRUMENTS INC. (Plainview, N.Y.).

"Lightpipe for high temperature substrate processing" was invented by Ji-Dih Hu (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate processing system in accordance with one embodiment includes a processing chamber and an optical pyrometer assembly to measure an emitted thermal radiation originating substantially from a portion of target surfaces. The optical pyrometer includes a lightpipe that comprises a core and a hollow sheath surrounding the core. The core and the sheath are concentric with one another. The sheath is formed by a chemical ...