US Patent Issued to VEECO INSTRUMENTS on March 24 for "Chemical vapor deposition apparatus with multi-zone injection block" (New Jersey Inventors)

ALEXANDRIA, Va., March 24 -- United States Patent no. 12,584,223, issued on March 24, was assigned to VEECO INSTRUMENTS INC. (Plainview, N.Y.).

"Chemical vapor deposition apparatus with multi-zone injection block" was invented by Bojan Mitrovic (Somerset, N.J.), Ian Kunsch (Somerset, N.J.), Juan Gamarra (Morristown, N.J.) and Mandar Deshpande (Bridgewater, N.J.).

According to the abstract* released by the U.S. Patent & Trademark Office: "An injector block for supplying one or more reactant gases into a chemical vapor deposition reactor. The injector block including a plurality of first reactant gas distribution channels between one or more first reactant gas inlets and a plurality of first reactant gas distribution outlets to deliver a fi...