US Patent Issued to Vanguard International Semiconductor on Sept. 22 for "Method of fabricating micro-electromechanical system device" (Singaporean Inventor)

ALEXANDRIA, Va., Sept. 24 -- United States Patent no. 12,741,865, issued on Sept. 22, was assigned to Vanguard International Semiconductor Corp. (Hsinchu, Taiwan).

"Method of fabricating micro-electromechanical system device" was invented by Jia Jie Xia (Singapore).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure related to a micro-electromechanical system (MEMS) device and a method of forming the same. The MEMS device includes a substrate, a cavity, an interconnection structure and a proof mass. The substrate includes a first surface and a second surface opposite to the first surface. The cavity is disposed in the substrate to extend between the first surface and the second surface. The ...