ALEXANDRIA, Va., Sept. 10 -- United States Patent no. 12,414,218, issued on Sept. 9, was assigned to Ushio Denki K.K. (Tokyo).
"Light source apparatus" was invented by Yusuke Teramoto (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "A light source apparatus includes a disk-shaped rotation body, a raw material supply mechanism, a chamber body, and a foil trap. The raw material supply mechanism supplies a front surface of the rotation body with liquid raw material that is irradiated with an energy beam to generate plasma. The chamber body includes a beam introduction section that introduces the energy beam, a radiation extraction section that extracts radiation from the plasma that has been generated, and...