US Patent Issued to UP CHEMICAL on June 23 for "Silicon precursor compound, composition for forming silicon-containing film including the same, and method of forming silicon-containing film" (South Korean Inventors)

ALEXANDRIA, Va., July 15 -- United States Patent no. 12,662,495, issued on June 23, was assigned to UP CHEMICAL Co. LTD. (Pyeongtaek-si, South Korea).

"Silicon precursor compound, composition for forming silicon-containing film including the same, and method of forming silicon-containing film" was invented by Jin Sik Kim (Pyeongtaek-si, South Korea), Byung Kwan Kim (Pyeongtaek-si, South Korea), Jun Hwan Choi (Goyang-si, South Korea) and Da Som Yu (Pyeongtaek-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure relates to a silicon precursor compound, a method of preparing the silicon precursor compound, a silicon-containing film-forming precursor composition including the sil...