US Patent Issued to Unity Semiconductor, Unity Semiconductor on March 31 for "Method and system for discriminating defects present on a frontside from defects present on a backside of a transparent substrate" (French, German Inventors)

ALEXANDRIA, Va., March 31 -- United States Patent no. 12,590,905, issued on March 31, was assigned to Unity Semiconductor (Montbonnot-Saint-Martin, France) and Unity Semiconductor GmbH (Dresden, France).

"Method and system for discriminating defects present on a frontside from defects present on a backside of a transparent substrate" was invented by Alexey Butkevich (Dresden, Germany) and Jean Boulanger (Saint Ismier, France).

According to the abstract* released by the U.S. Patent & Trademark Office: "Method for discriminating defects present on a frontside of a transparent substrate from defects present on a backside of the substrate comprises disposing the substrate in an inspection system in which first and a second light beams interse...