US Patent Issued to UNITED MICROELECTRONICS on March 31 for "Automatic calibration method and automatic calibration equipment for testing probe set used in semiconductor process" (Taiwanese Inventors)

ALEXANDRIA, Va., March 31 -- United States Patent no. 12,591,032, issued on March 31, was assigned to UNITED MICROELECTRONICS CORP. (Hsinchu, Taiwan).

"Automatic calibration method and automatic calibration equipment for testing probe set used in semiconductor process" was invented by Zheng-Yang Li (Kaohsiung City, Taiwan) and Chia-Chan Tsai (Tainan City, Taiwan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An automatic calibration method and an automatic calibration equipment for a testing probe set used in a semiconductor process are provided. The automatic calibration method of the test probe set used in the semiconductor manufacturing process includes the following steps. A preliminary correction offset...