ALEXANDRIA, Va., Jan. 13 -- United States Patent no. 12,523,560, issued on Jan. 13, was assigned to UNITED MICROELECTRONICS CENTER Co. LTD. (Chongqing, China).
"Piezoelectric MEMS acoustic sensor" was invented by Pengcheng Wu (Chongqing, China) and Wei Mong Tsang (Chongqing, China).
According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a piezoelectric MEMS acoustic sensor, comprising a substrate, an inner electrode area, and an outer electrode area; the outer electrode area is located at the periphery of the inner electrode area; a lower support layer is provided on the top of the substrate, the inner electrode area and the outer electrode area are located on the lower support layer, and an upper support ...