US Patent Issued to TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING on Nov. 3 for "Focusing device having an image plane extending parallel or congruent to a target plane" (German Inventor)

ALEXANDRIA, Va., Nov. 3 -- United States Patent no. 12,782,745, issued on Nov. 3, was assigned to TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING GMBH (Ditzingen, Germany).

"Focusing device having an image plane extending parallel or congruent to a target plane" was invented by Boris Regaard (Stuttgart, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "A focusing device for focusing at least two laser beams onto a moving target material in a target region for generating extreme ultraviolet (EUV) radiation is provided. The focusing device includes a first focusing element for focusing a first laser beam onto the target material at a first position in the target region, a second focusing element for f...