US Patent Issued to Tower Semiconductor on Oct. 27 for "Increasing Q-time" (Italian, American, Israeli Inventors)

ALEXANDRIA, Va., Oct. 27 -- United States Patent no. 12,777,871, issued on Oct. 27, was assigned to Tower Semiconductor Ltd. (Migdal Haemek, Israel).

"Increasing Q-time" was invented by Alex Sirkis (Yokneam Illit, Israel), Julian Guzman (Irvine, Calif.), Carlo Romano (Vedano al Lambro, Italy) and Simone Marchetti (Landriano, Italy).

According to the abstract* released by the U.S. Patent & Trademark Office: "There is provided a method that includes (i) removing organic polymer residuals formed on a dry-etched hole that leads to a semiconductor structural element and coating the dry-etched hole with a non-organic polymer to provide a coated hole by exposing the dry-etched hole to a gaseous mixture, the gaseous mixture includes a fluorine ba...