ALEXANDRIA, Va., April 7 -- United States Patent no. 12,597,872, issued on April 7, was assigned to TOTO Ltd. (Fukuoka, Japan).
"Electrostatic chuck and method of manufacturing the same" was invented by Shunya Miyazaki (Fukuoka, Japan), Jun Shiraishi (Fukuoka, Japan), Yutaka Momiyama (Fukuoka, Japan) and Ikuo Itakura (Fukuoka, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "An electrostatic chuck includes: a dielectric substrate on which at least one first gas hole is formed; a base plate on which at least one second gas hole is formed; and a joining layer which is provided between the dielectric substrate and the base plate and which is formed of an insulating material. A first opening being an end of ...