US Patent Issued to TOMOEGAWA on Oct. 27 for "Electrostatic chuck" (Japanese Inventors)

ALEXANDRIA, Va., Oct. 27 -- United States Patent no. 12,777,892, issued on Oct. 27, was assigned to TOMOEGAWA Corp. (Tokyo).

"Electrostatic chuck" was invented by Ryouji Shikata (Shizuoka, Japan), Yuki Shimizu (Shizuoka, Japan), Tomoya Hagihara (Shizuoka, Japan) and Junya Arashima (Shizuoka, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An electrostatic chuck includes an internal electrode and a resin layer that embeds a periphery of the internal electrode. The resin layer contains a thermo-conductive filler."

The patent was filed on March 31, 2023, under Application No. 18/848,715.

*For further information, including images, charts and tables, please visit: http://patft.uspto.gov/netacgi/nph-Parser...