ALEXANDRIA, Va., Nov. 3 -- United States Patent no. 12,782,387, issued on Nov. 3, was assigned to TOKYO SEIMITSU Co. LTD. (Hachioji, Japan).
"Prober with falling restriction mechanism" was invented by Toya Kera (Hachioji, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A prober includes a measurement unit, a wafer chuck, an alignment device, and a falling restriction mechanism. The wafer chuck holds a wafer on its upper surface and is held on the lower surface of the measurement unit. The falling restriction mechanism restricts falling of the wafer chuck from the lower surface of the measurement unit. The falling restriction mechanism includes a plurality of falling restriction claws and a position cont...