US Patent Issued to Tokyo Electron on Sept. 8 for "Systems and methods that use infrared (IR) spectroscopy to monitor process chemicals utilized in a semiconductor process" (Texas, New York Inventors)

ALEXANDRIA, Va., Sept. 8 -- United States Patent no. 12,733,457, issued on Sept. 8, was assigned to Tokyo Electron Ltd. (Tokyo).

"Systems and methods that use infrared (IR) spectroscopy to monitor process chemicals utilized in a semiconductor process" was invented by Sean Berglund (Austin, Texas), Michael Carcasi (Austin, Texas), Robert Brandt (Albany, N.Y.), Joshua Hooge (Austin, Texas), Ankur Agarwal (Austin, Texas) and Ryan Burns (Austin, Texas).

According to the abstract* released by the U.S. Patent & Trademark Office: "Various embodiments of improved systems and methods are provided herein to monitor process chemicals used in a semiconductor process. More specifically, new semiconductor processing systems and methods that utilize inf...