ALEXANDRIA, Va., Sept. 8 -- United States Patent no. 12,731,762, issued on Sept. 8, was assigned to Tokyo Electron Ltd. (Tokyo).
"Method for plasma processing" was invented by Justin Moses (Austin, Texas), Merritt Funk (Austin, Texas), Chelsea DuBose (Austin, Texas) and Barton Lane (Austin, Texas).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method for multitone plasma processing includes providing a substrate into a plasma processing chamber, igniting a plasma in the plasma processing chamber with a multitone signal, and performing a first plasma process on the substrate with the plasma. The multitone signal includes a first tone and a second tone."
The patent was filed on Aug. 22, 2023, under Applicati...