US Patent Issued to Tokyo Electron on Sept. 8 for "Measurement jig and processing method" (Japanese Inventors)

ALEXANDRIA, Va., Sept. 8 -- United States Patent no. 12,733,434, issued on Sept. 8, was assigned to Tokyo Electron Ltd. (Tokyo).

"Measurement jig and processing method" was invented by Masakazu Yamamoto (Iwate, Japan) and Tadashi Enomoto (Iwate, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A measurement jig for measuring the conditions in a device and a processing method are provided. A measurement jig having a substrate, a back-surface camera provided on a back-surface side of the substrate, and a controller configured to control the back-surface camera."

The patent was filed on May 31, 2022, under Application No. 17/804,671.

*For further information, including images, charts and tables, please vi...