US Patent Issued to Tokyo Electron on Sept. 8 for "Information processing system, abnormality detection method, and heat treatment apparatus" (Japanese Inventors)

ALEXANDRIA, Va., Sept. 8 -- United States Patent no. 12,730,439, issued on Sept. 8, was assigned to Tokyo Electron Ltd. (Tokyo).

"Information processing system, abnormality detection method, and heat treatment apparatus" was invented by Masakazu Yamamoto (Iwate, Japan) and Tadashi Enomoto (Iwate, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An information processing system includes a heat treatment apparatus that performs heat treatment on a processing target substrate by using a heating unit, and an information processing apparatus that controls power supplied to the heating unit. The information processing system further includes a heating control unit that controls the power supplied to the heatin...