US Patent Issued to Tokyo Electron on Sept. 8 for "Information processing method, information processing apparatus, and storage medium" (Japanese Inventor)

ALEXANDRIA, Va., Sept. 8 -- United States Patent no. 12,731,241, issued on Sept. 8, was assigned to Tokyo Electron Ltd. (Tokyo).

"Information processing method, information processing apparatus, and storage medium" was invented by Shuji Iwanaga (Koshi City, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An information processing method of processing information for inspecting a substrate based on a captured image of the substrate, includes: acquiring the captured image of the substrate; creating a two-dimensional histogram using a distance from a center of the substrate and a luminance value as axes regarding the acquired captured image of the substrate; extracting a specific unevenness distribution co...