US Patent Issued to Tokyo Electron on Sept. 8 for "Apparatus and method for plasma measurement" (New York Inventors)

ALEXANDRIA, Va., Sept. 8 -- United States Patent no. 12,730,085, issued on Sept. 8, was assigned to Tokyo Electron Ltd. (Tokyo).

"Apparatus and method for plasma measurement" was invented by Sergey Voronin (Albany, N.Y.), Carl Smith (Albany, N.Y.), Nicholas Smieszek (Albany, N.Y.), Qi Wang (Albany, N.Y.), Akiteru Ko (Albany, N.Y.), James Grootegoed (Albany, N.Y.), Norman Jacobson (Albany, N.Y.), Ronald Nasman (Albany, N.Y.) and Cheryl Alix (Albany, N.Y.).

According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus for plasma measurement includes an electrode within a remote capacitive sensor, a capacitor within the remote capacitive sensor, and a capillary array disposed within a top surface of the remote capa...