US Patent Issued to Tokyo Electron on Sept. 22 for "Shape characteristic value estimation apparatus, shape characteristic value estimation method, and storage medium" (Japanese Inventors)

ALEXANDRIA, Va., Sept. 24 -- United States Patent no. 12,743,769, issued on Sept. 22, was assigned to Tokyo Electron Ltd. (Tokyo).

"Shape characteristic value estimation apparatus, shape characteristic value estimation method, and storage medium" was invented by Toyohisa Tsuruda (Koshi City, Japan) and Masato Hosaka (Fuchu City, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus includes: an acquisitor for acquiring a processed image including information about a surface of a processed substrate after a process of a target film; an estimator for estimating a shape characteristic value of the target film, by applying, to the processed image, an estimation model associated with a correlation bet...