US Patent Issued to Tokyo Electron on Sept. 15 for "Grinding apparatus" (Japanese Inventor)

ALEXANDRIA, Va., Sept. 15 -- United States Patent no. 12,734,641, issued on Sept. 15, was assigned to Tokyo Electron Ltd. (Tokyo).

"Grinding apparatus" was invented by Munehisa Kodama (Kikuchi-gun, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A grinding apparatus includes a chuck, a housing, a tool driving unit, a nozzle, a sensor and a sensor cover. The chuck is configured to hold a substrate. The housing accommodates the chuck therein. The tool driving unit is configured to drive a grinding tool pressed against the substrate within the housing. The nozzle is configured to supply a grinding liquid to the substrate within the housing. The sensor is disposed at an inside of the housing and is configur...