US Patent Issued to Tokyo Electron on Oct. 20 for "Temperature control system and plasma processing system" (Japanese Inventors)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,770,845, issued on Oct. 20, was assigned to Tokyo Electron Ltd. (Tokyo).

"Temperature control system and plasma processing system" was invented by Hayato Sakai (Miyagi, Japan) and Kazuhiro Chiba (Miyagi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "The disclosed temperature control system includes a first segment, a second segment, and a connector. The first segment includes a first temperature control circuit and a first case accommodating the first temperature control circuit therein, the first temperature control circuit including a first heat exchanger for exchanging heat with a first temperature-controlled medium. The second segment include...